Thin Film Materials

Thin film materials are high purity materials and chemicals such as precursor gases, sputtering targets or evaporation filaments used to form or modify thin film deposits and substrates. There are several types of thin film materials. Examples include a precursor gas, sputtering target, evaporation filament, evaporator film, thin film measurement, and thin film coating. A precursor gas is utilized in a method for depositing onto a thin film substrate. A sputtering target and arc cathode are employed in many areas of manufacturing for the production of a thin film substrate. An evaporation filament can be used for depositing aluminum, silver, copper, and gold onto a thin film substrate for the fabrication of hybrid circuits. A thin film measurement system is capable of measuring multiple film layers, cell gap, color, LCD and many other substances. A thin film coating is primarily used to apply dopants and sealants to chips and other microelectronic parts. Other thin film materials are commonly available.

Thin film materials function in a variety of ways. Using a precursor gas method involves providing a metal-containing precursor to an activation zone, and activating the metal-containing precursor to form an activated precursor. The activated precursor gas is moved to a reaction chamber, and a film is deposited on a substrate using a cyclical deposition process, wherein the activated precursor gas and a reducing gas are alternately adsorbed onto the substrate. In the sputtering target process, argon plasma is ignited in a vacuum chamber and argon ions are accelerated towards a negatively charged cathode by means of an electrical field. The argon ions infuse the target with high kinetic energy, resulting in the emission of atoms of the target material. The atoms diffuse through a vacuum chamber and condense as a thin layer on a substrate. An evaporation filament has the advantages of efficient outgassing, easy reloading of metal charges, and automatic termination of evaporation before less volatile impurities can be evaporated. A falling evaporator film can be operated with very low temperature differences between the heating media and the boiling liquid. A falling evaporator film also has very short product contact times, typically just a few seconds per pass. These characteristics make a falling evaporator film particularly suitable for heat-sensitive products, and are the most frequently used type of film evaporator. A complete thin film measurement system includes a microscope unit, camera unit, fiber optical adapter pieces, computer unit, spectroscopy card, and system software. A thin film coating includes aluminum coatings, chromium coatings, copper coatings, gold coatings, indium coatings, silicone dioxide coatings, silver coatings, and titanium coatings. Thin film materials are designed and manufactured to meet most industry specifications.

Thin film materials are utilized in a variety of applications. Examples include R&D and production applications, particularly in the fields of compound semiconductor, LED, optical components, and ophthalmics. Thin film materials are also used to supply custom coatings and patterned substrates for sensors, flat panel displays, micro-electro mechanical systems (MEMS), microcircuits, biomedical devices, optical instruments, microwave communications, integrated circuits, and microelectronics in general.

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Part Numbers for Thin Film Materials